Superconducting Layers by Gallium Implantation and Short-Term Annealing in Semiconductors

and Short-Term Annealing in Semiconductors J. Fiedlera,b,∗, V. Heera, M. Voelskow, A. Mucklich, H. Reuther, W. Skorupa, G. Gobsch and M. Helm Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf (HZDR) P.O. Box 51 01 19, D-01314 Dresden, Germany Experimental Physics, Institute of Physics, Ilmenau University of Technology Weimarer Str. 32, 98693 Ilmenau, Germany