Crystalline silicon nanomembrane stacking for large-area flexible photodetectors
2009
Flexible photodetectors were demonstrated experimentally on large-area crystalline silicon nanomembranes (3 mmx3 mm), based on wet transfer and metal-frame supported transfer processes. Very low dark current (a few nA) and linear photoresponses were demonstrated for both Si MSM and InP PIN photodiodes on flexible PET substrates.
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