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Research on parallelization mechanism of inductively coupled plasma for large area plasma source
Research on parallelization mechanism of inductively coupled plasma for large area plasma source
2016
Jang Jae Lee
Sijun Kim
Gwang-Gi Kim
Ba-Da Lee
Yeong Seok Lee
Hui-Jung Yeom
Dae Ung Kim
Sin Jae Yu
Keywords:
Plasma
Computational physics
Inductively coupled plasma
Materials science
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