Old Web
English
Sign In
Acemap
>
Paper
>
Extreme Ultraviolet Source Using Laser-Produced Li Plasma
Extreme Ultraviolet Source Using Laser-Produced Li Plasma
2009
Akihisa Nagano
Sho Amano
Shuji Miyamoto
Takayasu Mochizuki
Keywords:
Plasma
Electronic engineering
Extreme ultraviolet
Laser
Optoelectronics
Energy conversion efficiency
Computer science
Extreme ultraviolet lithography
X-ray laser
Optics
Correction
Source
Cite
Save
Machine Reading By IdeaReader
9
References
0
Citations
NaN
KQI
[]