Stability enhancement in InGaZnO thin-film transistor with a novel Al2O3/HfO2/Al2O3 as gate insulator

Xingwei Ding,Cunping Qin,Tao Xu,Jiantao Song,Jianhua Zhang,Xue Yin Jiang,Zhi-Lin Zhang

Stability enhancement in InGaZnO thin-film transistor with a novel Al2O3/HfO2/Al2O3 as gate insulator

2017

Xingwei Ding
Cunping Qin
Tao Xu
Jiantao Song
Jianhua Zhang
Xue Yin Jiang
Zhi-Lin Zhang

This work reports an efficient route for enhancing the stability of amorphous InGaZnO (a-IGZO) thin film transistors (TFTs). It is clearly observed that the off-current in IGZO-TFT decreases by usi...

Keywords:

Photochemistry
Thin-film transistor
Analytical chemistry
Insulator (electricity)
Chemistry
gate insulator
Optoelectronics

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