Design of control system of vacuum annealing furnace for quartz crystal

To meet the process control requirements of vacuum annealing furnace for quartz crystal, an electrical control system was designed with the SIMATIC S7-300 PLC as core component and industrial touch screen as man-machine interface. The closed-loop control modules FM355-2S were selected for adaptive temperature control in many zones to reduce the heavy burden of control CPU module and improve the system reliability. The application results showed that the control system runs stably with all performance indices meeting technical requirements.