Absorption of EUV in laser plasmas generated on xenon gas jets

Abstract Laser plasmas have been produced using a xenon gas jet as a target. Spectra in the range of 5– 20 nm were recorded using a transmission grating spectrograph. A quantitative spectral analysis is given of the dependence of the EUV source brightness ∼13.5 nm on two critical parameters, namely the initial target gas density and EUV absorption in the outermost, low-density target zone.