EQE enhancement of top-cell of GaAs-based triple-junction solar cell using graded-index sio 2 nano-pillars sub-wavelength AR-coating

We report the increasing in average external quantum-efficiency (EQE) of 11% on the top-cell of GaAs-based triple-junction solar-cell due to current matching using a graded-index SiO 2 -nano-pillars sub-wavelength/SiO 2 /TiO 2 AR-coating by CF 4 -RIE etching with Ag-nanoparticles mask.