MEMS-based interdigital gap beam structure energy collector and manufacturing method thereof

The invention provides an MEMS-based interdigital gap beam structure energy collector and a manufacturing method thereof. At present, in an MEMS technique energy recycling researching process, the problem of manufacturing a PZT film on a micrometer scale gap cantilever beam exists, and achievement of mass production of energy collectors is restricted. The method comprises the steps that a top PZT composite film beam and two bottom support silicon beams are provided, and the two ends of the top PZT composite film beam and the two ends of each bottom support silicon beam are connected with mass blocks and fixing blocks respectively, wherein the top PZT composite film beam comprises a PZT beam layer, an upper metal electrode and a lower metal electrode, the upper metal electrode is connected with the upper layer of the PZT beam layer, and the lower metal electrode is connected with the lower layer of the PZT beam layer. The MEMS-based interdigital gap beam structure energy collector is used for micro-electronic mechanical devices.