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Engineering the Growth of MoS2 via Atomic Layer Deposition of Molybdenum Oxide Film Precursor
Engineering the Growth of MoS2 via Atomic Layer Deposition of Molybdenum Oxide Film Precursor
2016
Christian Martella
Pierpaolo Melloni
Eugenio Cinquanta
E. Cianci
M. Alia
M. Longo
A. Lamperti
S. Vangelista
M. Fanciulli
Alessandro Molle
Keywords:
Atomic layer epitaxy
Oxide
Dewetting
Atomic layer deposition
Molybdenum
Inorganic chemistry
Materials science
molybdenum oxide
Chemical engineering
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