Capacitive composite sensor and manufacturing method thereof

The invention discloses a capacitive composite sensor and a manufacturing method thereof. The method comprises the following steps of forming a first cavity and a second cavity which are independent in a substrate, forming a first suspended film at the upper side of the first cavity and forming a suspended film area at the upper side of the second cavity, wherein at least one second suspended film is included in the suspended film area; and forming a first electrode electrically connected to the first suspended film on the first suspended film, forming a second electrode electrically connected to each second suspended film above each second suspended film in the suspended film area, and forming a substrate electrode electrically connected to the substrate above the substrate. The invention also provides the capacitive composite sensor, the effects of a simple technological process and a capability of avoiding the adhesion phenomenon are realized, and the capacitive compound sensor has a wafer-level self-test function.