Old Web
English
Sign In
Acemap
>
Paper
>
Research of Resonator Fabrication Technology Based on Silicon Resonant Pressure Sensor
Research of Resonator Fabrication Technology Based on Silicon Resonant Pressure Sensor
2018
Yide Peng
Zhengyuan Zhang
Chunhai Zhang
Keywords:
Optoelectronics
Reactive-ion etching
Resonator
Fabrication
Pressure sensor
Materials science
Silicon
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]