The effect of Sr and Bi on the Si(100) surface oxidation: Auger electron spectroscopy, low energy electron diffraction, and x‐ray photoelectron spectroscopy study

The effect of Sr and Bi on the oxidation of the Si (100) surface has been studied by Auger electron spectroscopy, low electron diffraction, and x‐ray photoelectron spectroscopy. A dramatic enhancement, by a factor of 10, of the Si oxidation has been observed for Si(100) with a Sr overlayer. The SR‐enhanced Si oxidation has been studied as a function of O2 exposure and Sr coverage. In contrast to the oxidation promotion of Sr on Si, it has been also observed that a Bi overlayer on Si(100) reduced Si oxidation significantly. Sr adsorption on the Si(100) with a Bi overlayer enhances Si oxidation only at Sr coverage θSr >0.3 ML.