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Patterning of porous SiOCH: metallic and organic hard mask strategies
Patterning of porous SiOCH: metallic and organic hard mask strategies
2009
J. Ducote
Thibaut David
Nicolas Posseme
Thierry Chevolleau
C. Verove
J. C. Barbe
R-L Inglebert
Olivier Joubert
Keywords:
hard mask
Porosity
Metal
Materials science
Nanotechnology
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