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Monte Carlo Simulation of Via and Trench Fillings by Three-Dimensional Solid-by-Solid Model
Monte Carlo Simulation of Via and Trench Fillings by Three-Dimensional Solid-by-Solid Model
2009
Yutaka Kaneko
Yasuaki Hiwatari
Katsuhiko Ohara
Fujio Asa
Keywords:
Computational chemistry
Monte Carlo method
Trench
Physics
Mechanics
Materials science
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