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Epitaxy of III-V based channels on Si and transistor integration for 12-nm node CMOS
Epitaxy of III-V based channels on Si and transistor integration for 12-nm node CMOS
2012
Matty Caymax
Clement Merckling
Gang Wang
Tommaso Orzali
Weiming Guo
Wilfried Vandervorst
Johan Dekoster
Niamh Waldron
Aaron Thean
Keywords:
Epitaxy
CMOS
Optoelectronics
Transistor
Materials science
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