Statistics-Based Correction to Measurements of Hardness of Rough Surfaces by Instrumented Indentation

Abstract—A procedure for correcting hardness data measured on rough surfaces using instrumented indentation is presented. The correction procedure relies on the knowledge of surface topography, which can be obtained by atomic force microscopy or other appropriate instrumental technique. The analyzed surface is characterized by the standard deviation of height distribution and an autocorrelation function. The latter is proposed to be modeled with an exponential function with either a quadratic or linear exponent.