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低速陽電子ビームを用いたhigh-kゲート絶縁膜の空隙の評価(ゲート絶縁膜,容量膜,機能膜及びメモリ技術)
低速陽電子ビームを用いたhigh-kゲート絶縁膜の空隙の評価(ゲート絶縁膜,容量膜,機能膜及びメモリ技術)
2006
meiryou ue dono
suu ootuka
ken'iti itou
kenzi siroisi
kikuo yamabe
seiiti miyazaki
naoto umesawa
yutaka hirosi ti kyou
tosiyuki oohira
ryouiti suzuki
seizi inu miya
satosi kamiyama
yasusi akasaka
yasuo nara
keisaku yamada
Keywords:
Artificial intelligence
Machine learning
Computer science
Speech recognition
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