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Development of thermal sensors by implantation ions P+ and B+ in different sides of Si(111)
Development of thermal sensors by implantation ions P+ and B+ in different sides of Si(111)
2018
I. R. Bekpulatov
A. S. Rysbaev
Sh. Kh. Dzhuraev
A. S. Kasymov
Keywords:
Thermal
Ion
Materials science
Inorganic chemistry
thermal sensors
Optoelectronics
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