Investigation of laser-patterned silicon transmittance in the frequency range of 0.1-4.7 THz
2019
the dependence of THz transmittance on the surface roughness of differently laser-patterned silicon was investigated in the frequency range of 0.1-4.7 THz. The scattering of THz waves on rough silicon surface was found as the main mechanism that determines optical losses of laser-ablated silicon. The impact on the THz absorption losses of the silicon processed in ambient air and argon enriched environment was also discussed.
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