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ConCVD and ProConCVD: Development of High-Throughput CVD Tools on the Way to Low-Cost Silicon Epitaxy
ConCVD and ProConCVD: Development of High-Throughput CVD Tools on the Way to Low-Cost Silicon Epitaxy
2009
Norbert Schillinger
David Pocza
Martin Arnold
Stefan Reber
Keywords:
Chemical vapor deposition
Metalorganic vapour phase epitaxy
Thin film
Epitaxy
Molecular beam epitaxy
Atomic layer deposition
Analytical chemistry
Pulsed laser deposition
Materials science
Combustion chemical vapor deposition
Optoelectronics
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