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Atomic Layer Mocvd of Oxide Superconductors and Dielectrics
Atomic Layer Mocvd of Oxide Superconductors and Dielectrics
1999
Shunri Oda
Shuu'ichirou Yamamoto
Z. Wang
Hiroshi Tobisaka
Kouji Nagata
Keywords:
Dielectric
Oxide
Metalorganic vapour phase epitaxy
Superconductivity
Materials science
Inorganic chemistry
Optoelectronics
oxide superconductors
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