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溅射靶功率对W-C:H薄膜结构与摩擦学性能的影响
溅射靶功率对W-C:H薄膜结构与摩擦学性能的影响
2017
Shangqi Sun
Xiang Liu
Yongxin Wang
lijinlong
wangliping
Keywords:
Toughness
Metallurgy
Materials science
friction coefficient
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