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Effects of Channeling on the Distribution of Electrically Active Boron and Phosphorous Atoms in Silicon Single Crystals
Effects of Channeling on the Distribution of Electrically Active Boron and Phosphorous Atoms in Silicon Single Crystals
1971
V. M. Gusev
N. P. Busharov
K. D. Demakov
Yu. G. Kozlov
Keywords:
Boron
Crystallography
Single crystal
Crystal
Atom
Silicon
Materials science
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