Old Web
English
Sign In
Acemap
>
Paper
>
Nanocrystalline γ-Al2O3 thin film deposited by magnetron sputtering (MS) at low temperature
Nanocrystalline γ-Al2O3 thin film deposited by magnetron sputtering (MS) at low temperature
2010
Adele Carradò
Mohamed A. Taha
N. A. El-Mahallawy
Keywords:
Nanocrystal
Thin film
High-power impulse magnetron sputtering
Nanocrystalline material
Sputter deposition
Composite material
Cavity magnetron
Physical vapor deposition
Materials science
Metallurgy
wear resistance
Analytical chemistry
Correction
Source
Cite
Save
Machine Reading By IdeaReader
18
References
10
Citations
NaN
KQI
[]