Artificially modulated hard coatings produced with a vacuum arc evaporator
2016
The experimental set for artificially modulated structures production through an advanced vacuum arc evaporator with a magnetically-driven cathode spots on the cathode surface is described. The main features of vacuum arc as a vapor source with time-modulated compositions are discussed. The characteristics of the obtained multilayer coatings with artificially modulated Ti/TiB structures are presented.
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