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Future of Functional Water in Surface Finishing Industries. Redox-Ultrapure Water Cleaning for LSI/LCD Manufacturing.
Future of Functional Water in Surface Finishing Industries. Redox-Ultrapure Water Cleaning for LSI/LCD Manufacturing.
2000
Takashi Imaoka
Koji Yamanaka
Keywords:
Redox
Materials science
Surface finishing
Liquid-crystal display
Metallurgy
Ultrapure water
Correction
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