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Formation of PZT thin‐film capacitors over W‐plugs and low‐voltage operation for high‐density LSIs
Formation of PZT thin‐film capacitors over W‐plugs and low‐voltage operation for high‐density LSIs
2000
Katsuhiro Aoki
Tomoyuki Sakoda
Satoshi Hashimoto
Yukio Fukuda
Osamu Handa
Tomomasa Emoto
Keywords:
Computer science
Capacitor
Thin film
Electronic engineering
Low voltage
Tin
high density
oxygen barrier
Correction
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