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Deep‐UV lithography of nanocomposite thin films into magnetooptical gratings with submicron periodicity
Deep‐UV lithography of nanocomposite thin films into magnetooptical gratings with submicron periodicity
2020
Dominique Berling
Clémentine Bidaud
Emilie Gamet
Damien Jamon
Loïc Vidal
Sophie Neveu
Olivier Soppera
Francois Royer
Keywords:
Optoelectronics
Nanocomposite
Photolithography
nanocomposite thin films
Materials science
Faraday effect
Correction
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