Micromechanical component with a monolithic integrated circuit and method for manufacturing a device
2006
Disclosed is a micro mechanical component and a method for producing such a device, the device comprising a micromechanical structure and an integrated circuit, wherein the micromechanical structure monolithically integrated with the circuit provided, the circuit micromechanical in a circuit area of the substrate and the structure is provided in a sensor area of the substrate, wherein the material of the substrate is seamlessly provided both in the region of a sacrificial layer and in the region of a functional layer.
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