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HAX-PES Study of SiN Film for Charge Storage Layer in High Performance SONOS Type Flash Memory Cell
HAX-PES Study of SiN Film for Charge Storage Layer in High Performance SONOS Type Flash Memory Cell
2009
Daisuke Kosemura
Munehisa Takei
Kohki Nagata
Hiroaki Akamatsu
Maki Hattori
Daisuke Katayama
Tatsuo Nishita
Toshio Nakanishi
Yoshihiro Hirota
Masatake Machida
Jin-Young Son
Tomoyuki Koganezawa
Ichiro Hirosawa
Atsushi Ogura
Keywords:
Electronic engineering
Charge trap flash
Flash memory
Materials science
Optoelectronics
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