P-220L: Late-News Poster: Layer-Transfer of Silicon Single-Crystal Films on Large-Area Glass Substrates For Mobile Display Applications

The fabrication of multilayer single-crystal on large-area FPD glass was demonstrated for the first time using a film layer-transfer method. Multiple substrate transfers were successfully made on FPD glass to release a 1000–4000 Angstrom film of single-crystal silicon. Both electrostatic and plasma-activated bonding was shown to be effective in achieving film transfer.