SnO 2 산화물 반도체 1차원 나노구조를 이용한 가스센서

A simple process of making sensitive SnO₂ nanowire-based gas sensor by using standard semiconducting fabrication process was studied. The nanowires were aligned in-situ during nanowire synthesis by thermal CVD process and the nanowire network structure between the electrodes was obtained. The NO₂ gas sensitivity was 10~350 when the NO₂ concentration was 1~20ppm. The response time was ca. 20~40 sec.