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Fundamental studies on alternative high-kappa gate dielectric materials
Fundamental studies on alternative high-kappa gate dielectric materials
2005
Anand S Deshpande
Keywords:
Gate oxide
Dielectric
High-κ dielectric
Gate dielectric
Electronic engineering
Thin-film transistor
Oxide thin-film transistor
Field-effect transistor
Analytical chemistry
Equivalent oxide thickness
Materials science
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