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Modified Hot-Zone Design of Growth Cell for Reducing the Warpage of 6”-SiC Wafer
Modified Hot-Zone Design of Growth Cell for Reducing the Warpage of 6”-SiC Wafer
2020
Byung Kyu Jang
Jong Hwi Park
Jung-Woo Choi
Eunsu Yang
Jung Gyu Kim
Sang-Ki Ko
Myung Ok Kyun
Kap Ryeol Ku
Yeon Suk Jang
Won-Jae Lee
Keywords:
hot zone
Metallurgy
Composite material
Wafer
Growth cell
Materials science
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