Study on Micro Reversible Electrical Discharge Machining Method for the Fabrication of Micro Structures

A reversible machining method using micro electrical discharge machining (EDM) was developed. This new method can achieve depositing or selective removing of metal material for the fabrication of micro structures. It is easy to transform the machining process from deposition to removal in one EDM machining system. In micro EDM deposition process, brass, tungsten and steel material can be deposited successfully. The deposited material has compact fine texture and combines close to workpiece. Then, micro complex structures by series deposition strategy and sub-deposition strategy were deposited. In the selective removal process, the machining effects of different working mediums were researched. Results show that the machining effect in liquid medium is better than that of in air. Finally, using the micro reversible EDM process, a micro square column with 0.070mm in side length, 0.750mm in height and a micro cylinder with 0.140mm in diameter, 1.180mm in height were fabricated.