Synthesis of mesoporous ZnO, AZO, and BZO transparent conducting films using nonionic triblock copolymer as template

Abstract Mesoporous zinc oxide (ZnO), Al-doped ZnO (AZO) and B-doped ZnO (BZO) thin films were synthesized by a sol–gel method using nonionic triblock copolymer (Pluronic F127: EO 106 PO 70 EO 106 ) as a soft template agent. Electrical and optical properties of the ZnO, AZO, and BZO films were investigated. Mesoporous ZnO films calcined at 500 °C showed a strong peak in the XRD pattern, showing a periodic distance of 12.8 nm. The visible light transmittance of the films ranged from 50% to more than 90% by changing the Zn/EO molar ratio in precursor solutions. The electric resistivity of the films was decreased by doping the optimum amount of Al or B atom. The minimum value of the BZO film was 0.024 Ω cm which can be obtained at the atomic ratio of B/Zn=0.005.