Ruthenium compound, process for producing same, process for producing ruthenium-containing thin film using same, and ruthenium-containing thin film
2009
(2,4-Dimethylpentadienyl)(ethylcyclopentadienyl)ruthenium from which a ruthenium-containing thin film can be produced even when the compound contains an analogous compound; a process for producing the ruthenium compound; a process for producing a ruthenium-containing thin film using said compound; and a ruthenium-containing thin film. An analogous compound is separated from (2,4-dimethylpentadienyl)(ethylcyclopentadienyl)ruthenium containing the analogous compound to thereby obtain (2,4-dimethylpentadienyl)(ethylcyclopentadienyl)ruthenium in which the content of the analogous compound is 5 wt.% or lower. This ruthenium compound is used as a raw material to produce a thin film.
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