Production of Y‐Ba‐Cu‐0 Superconducting Thin Films by an Aerosol Chemical Vapor Deposition Process

Thin film production by aerosol deposition is a simple, non-vacuum method, which under certain conditions of the process parameters, can be considered as a chemical vapor deposition (CVD) process. In this paper we describe the formation of superconducting thin films by aerosol deposition in the CVD regime by using metal-organic precursors. The best results were obtained with the metal β-diketonates of Y, Ba and Cu dissolved in butylacetate. This solution was nebulized and sprayed on a heated Si-substrate with a Zr02-buffer layer at a temperature of 450 C. After deposition a final heat treatment at a temperature of 800 C was applied. The resulting superconducting film has a Tc>2ero of 75 K.