Design of Thermopile-Based Infrared Detectors with Suspended Absorber-Thermopile Bi-Layers

A novel infrared(IR)detector is designed and presented.The detector takes advantage of suspended absorber-thermopile bi-layers to achieve high performance with a relatively small size.The bi-layers are realized by using two separated sacrificial layers,which include a Poly-Si film beneath the thermopiles and a polyimide deposition over the thermopiles.Simulation results demonstrate that the detectivity,responsibility and response time of the IR detectors can reach 2.85 × 108cmHz(1/2)/W,1 800 V /W and 6 ms,respectively.Moreover,the fabrication of the IR detector is highly compatible with standard CMOS process,which as a result,makes the high-yield and low-cost production possible.