Hydrogen Plasma Production in the Lower-Hybrid Frequency Range

Hydrogen plasmas are produced by using the radio frequency (r1; discharge. Plasma density ro depends strongly on the strength of the external magnetic field Bs and has a peak when Bs and the frequency satisfy the lower-hybrid resonance condition. Various types of antennas are used, and the helical antenna gives the maximum no of 5 x 1012 cm-3 at 3.5 kW and 200 G.