Liquid feeding device for polishing equipment

2017 
The invention discloses a liquid feeding device for polishing equipment. The liquid feeding device comprises a liquid feeding pipe, a first supporting part and a second supporting part; the liquid feeding pipe is used for feeding liquid for a polishing disc of polishing equipment when the polishing equipment conducts polishing operation; one end of the first supporting part points to the polishing disc, and the first supporting part is used for supporting the liquid feeding pipe; and one end of the second supporting part is connected with the other end of the first supporting part, and the second supporting part is provided with a movable assembly and can move on a baffle in the polishing equipment through the movable assembly. In this way, the second supporting part moves on the baffle through the movable assembly, the first supporting part can be driven to move along the baffle, and therefore the liquid feeding pipe can be driven to move along the baffle, polishing liquid falling points can be adjusted to any position of the polishing disc, and the adjustable scope of the liquid feeding position is enlarged.
    • Correction
    • Source
    • Cite
    • Save
    • Machine Reading By IdeaReader
    0
    References
    0
    Citations
    NaN
    KQI
    []