Near-Zero Power Mechanical Shock-Resistant Inertial Wakeup System with Scaled Inputs

This paper reports on a near-zero power inertial wakeup sensor system supporting digital weighting of inputs and with protection against false positives due to mechanical shocks. This improves upon existing work by combining the selectivity and sensitivity (Q-amplification) of resonant MEMS sensors with the flexibility of digital signal processing while consuming below 10 nW. The target application is unattended sensors for perimeter sensing and machinery health monitoring where extended battery life afforded by the low power consumption eliminates the need for power cables. For machinery health monitoring, the signals of interest are stationary but may contain spurious mechanical shocks.