Assessment of local analysis by fourier transform laser microprobe mass spectrometry with external ion source

Laser microprobe mass spectrometry (LMMS) is a technique for local analysis of inorganic and organic constituents in the μm range. This paper will focus on selected applications. First of all, element detection is illustrated by data from a 50-nm TiW layer on silicon and by the detection of residual Cr on HPLC column packing material. Speciation capabilities of LMMS are demonstrated on pure substances and on a coated neo-ceramic. Finally, the feasibility of organic analysis is shown in the case of a biologically active compound and dyed cloth fibres.