A New Collinear-Type Energy-Filtered X-ray Photoemission Electron Microscope Equipped with a Multi-Pole Aberration-Corrected Air-Core Coil Wien Filter

We present the prototype of a new, collinear-type energy-filtered X-ray photoemission electron microscope (EXPEEM) using a multi-pole, aberration-corrected air-core coil Wien filter (WF) analyzer. We have designed the new WF with 12-pole electrodes and magnetic poles to reduce spherical aberrations and fringe effects. We assess the performance of the WF using an electron energy analyzer for PEEM. The sensitivity is enhanced 10?100 fold compared with a simple, two electrodes plus two magnetic poles type WF. Cu 2p3/2 and Au 4f7/2 photoelectron energy selected images are obtained in a laboratory-scale source within several minutes. The energy and spatial resolutions of our prototype EXPEEM are estimated to be 3 eV and 7 ?m, respectively.