Formation and photoluminescence of self-assembled CdSe quantum dots

Self-assembled CdSe quantum dots (SAQDs) were fabricated by lower pressure metal organic chemical vapor deposition. 2MLs of CdSe coverage were deposited directly on GaAs(100) substrates. The formation process of CdSe SAQDs was monitored by atomic force microscopy. The formation of SAQDs below critical thickness was contributed to the effect of surface diffusion and releasing strain. The SAQDs PL spectrum was studied primitively.