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P implantation on doping of Ge: diffusion, activation, re-crystallization
P implantation on doping of Ge: diffusion, activation, re-crystallization
2005
Alessandra Satta
Tom Janssens
Trudo Clarysse
Eddy Simoen
Marc Meuris
Alessandro Benedetti
Ilse Hoflijk
Brice De Jaeger
Caroline Demeurisse
Wilfried Vandervorst
Keywords:
Crystallization
Doping
Inorganic chemistry
Materials science
Crystallography
re crystallization
Correction
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