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Properties of oxide film CMP with fumed silica slurry
Properties of oxide film CMP with fumed silica slurry
2010
Hiroyuki Kono
Toshiro Doi
Syuhei Kurokawa
Yoji Umezaki
Yoji Matsukawa
Tutomu Yamazaki
Yoshihiko Itoh
Keywords:
Oxide
Fumed silica
Slurry
Materials science
Inorganic chemistry
Chemical engineering
Dispersion (optics)
Correction
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