Inductively coupled plasma source and Vakuumprozessieranlage

According to various embodiments, an electrical oscillating circuit network of an inductively coupled plasma source may comprise: an electrical conductor (102) having a cavity structure for passing coolant through the electrical conductor (102) therethrough; a first capacitor (104-1), which by means of two terminals (104k) in such a way to the electrical conductor (102) is clamped, that the first capacitor (104-1) and the electrical conductor (102) form a first electrical resonant circuit; a second capacitor (104-2), which by means of two terminals (104k) in such clamped to the electrical conductor (102), that the second capacitor (104-2) and the electrical conductor (102) form a second electrical resonant circuit, wherein the second electrical resonant circuit is coupled to the first electrical resonant circuit, wherein the first electrical oscillatory circuit and the second electrical resonant circuit exactly one capacitor (104-1, 104-2) have.