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P2-29 Basic Study on Fabrication Technology of MEMS Transducer(Poster session 2)
P2-29 Basic Study on Fabrication Technology of MEMS Transducer(Poster session 2)
2006
Manabu Yokota
Kouji Sakata
Takanori Yamasaki
Keishin Koh
Kohji Hohkawa
Keywords:
Electronic engineering
Fabrication
Electrical engineering
Microelectromechanical systems
Materials science
Transducer
Engineering
Correction
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